Semester Offering: January

Micro-Electro Mechanical Systems (MEMS) are integration of mechanical elements and electronics on a common silicon wafer using microfabrication techniques. This course serves as an introduction to basic processes used in fabricating MEMS devices and designing MEMS sensors and actuators.


Fundamentals of MEMS Fabrication, Principles of Microsensors and Their Fabrication, Principles of Microactuators, Computer Aided Design of MEMS




I. Introduction

1. Evolution of Microsensors and Microactuators

2. MEMS Overview

3. Emergence of Micromachines

4. MEMS Applications

II. Fundamentals of MEMS Fabrication

1. Introduction and Description of Basic Processes

2. Bulk Micromachining

3. Surface Micromachining

4. Microstereo Lithography for MEMS

III. Principles of Microsensors and Their Fabrication

1. Introduction

2. Fabrication

3. Examples of Microsensors

IV. Principles of Microactuators

1. Introduction

2. Electric Field Driven Actuators

3. Piezoelectric and Magnetic Field Driven Actuator

4. Examples of Microactuators

V. Computer Aided Design of MEMS

1. Introduction to Modeling, Analysis and Simulation

2. MEMS Design Layout

3. MEMS Design Simulation using Finite Element Analysis


Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition, Marc J. Madou, CRC Press, 2 edition (2002), ISBN-10: 0849308267, ISBN-13: 978-0849308260


S.E. Lyshevski: MEMS and NEMS Systems, Devices and Structures, CRC Press, 2002

J. W.. Gardner,V.K. Varadan, O.O. Awadelkarim: Microsensor MEMS and Smart Devices, Wiley, 2001

T. Fukuda, W. Menz : Micromechanical Systems Principles and Technology, Elsevier, 1998


Sensors and Actuators

IEEE transactions on Electron Devices

IEEE Journal on Microelectromechanical Systems

Micromechanics and Microengineering



The final grade will be computed from the following constituent parts: mid-term exam (30%), final exam (50%), and assignments/ project/ field trip report (20%). Open-book examination is used for both mid-term and final exam.